Kinetic Monte Carlo simulation for the void defects formation in Czochralski silicon growth

Author: Lee Sang Hun   Cho Hyun Jong   Oh Hyun Jung   Kim Do Hyun  

Publisher: Taylor & Francis Ltd

ISSN: 0892-7022

Source: Molecular Simulation, Vol.36, Iss.3, 2010-03, pp. : 240-245

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Abstract