Role of substrate bias during deposition of magnetron sputtered Ni, Ti and Ni-Ti thin films

Author: Priyadarshini B G   Kumar Gupta M   Ghosh S   Chakraborty M   Aich S  

Publisher: Maney Publishing

ISSN: 1743-2944

Source: Surface Engineering, Vol.29, Iss.9, 2013-10, pp. : 689-694

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Abstract