Effects of wet-oxidized 4H-SiC annealed in HNO3/H2O vapour

Author： Poobalan Banu   Moon Jeong Hyun   Kim Sang-Cheol   Joo Sung-Jae   Bahng Wook   Kang In Ho   Kim Nam-Kyun   Cheong Kuan Yew  

Publisher： Emerald Group Publishing Ltd

ISSN： 1356-5362

Source： Microelectronics International, Vol.31, Iss.1, 2013-12, pp. : 42-53

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