Investigations of 3C-SiC inclusions in 4H-SiC epilayers on 4H-SiC single crystal substrates

Author: Si Weimin   Dudley Michael   Kong Hua   Sumakeris Joe   Carter Calvin  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.3, 1997-03, pp. : 151-159

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Abstract