Wet-chemical nanoscale patterning of GaAs surfaces using atomic force microscope lithography

Author： Klehn B.   Skaberna S.   Kunze U.  

Publisher： Academic Press

ISSN： 0749-6036

Source： Superlattices and Microstructures, Vol.25, Iss.1, 1999-01, pp. : 473-476

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