Polysilicon nanogap structure development using size expansion technique

Author: Hashim Uda   Taib Nazwa   Dhahi Thikra S.   Saifullah Azizullah  

Publisher: Emerald Group Publishing Ltd

ISSN: 1356-5362

Source: Microelectronics International, Vol.28, Iss.3, 2011-08, pp. : 24-30

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Abstract