A specimen-drift-free EDX mapping system in a STEM for observing two-dimensional profiles of low dose elements in fine semiconductor devices

Author： Tsuneta R.   Koguchi1 M.   Nakamura1 K.   Nishida2 A.  

Publisher： Oxford University Press

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.51, Iss.3, 2002-05, pp. : 167-171

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