Correction of higher order geometrical aberration by triple 3-fold astigmatism field

Author： Sawada Hidetaka Sasaki Takeo Hosokawa Fumio Yuasa Shuuichi Terao Mitsuhisa Kawazoe Muneyuki Nakamichi Tomohiro Kaneyama Toshikatsu Kondo Yukihito Kimoto Koji Suenaga Kazutomo

Publisher： Oxford University Press

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.58, Iss.6, 2009-12, pp. : 341-347

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