Deposition of ZrN x O y films by filtered cathodic vacuum arc

Author: Chen Y M   Zhang H Q   Li Z W   Cao W   Liao B   Zhang X  

Publisher: Maney Publishing

ISSN: 1743-2944

Source: Surface Engineering, Vol.29, Iss.8, 2013-09, pp. : 567-571

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract