Characterization of Cathodic-Arc-Ion-Plated ZrN/TiN Stacked Nano-Thin Film and Zr1-xTixN Films

Author: Lai Fu-Der  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.145, Iss.1, 2013-01, pp. : 151-157

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Abstract