Modification of a Plasma-Therm Inductively Coupled Plasma Supply to Enable Radio-frequency Power Modulation

Author: Ensman R. E.   Carr J. W.   Hieftje G. M.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.37, Iss.6, 1983-11, pp. : 571-573

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