Direct Synthesis of Yttrium Aluminum Garnet Particles in an Inductively Coupled Radio-Frequency Plasma System

Author： Jain Ricky   Girshick Steven   Heberlein Joachim   Mukherjee Rajesh   Zhang Bin   Nakamura Toshitaka   Mochizuki Amane  

Publisher： Springer Publishing Company

ISSN： 0272-4324

Source： Plasma Chemistry and Plasma Processing, Vol.30, Iss.6, 2010-12, pp. : 795-811

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