Spatial Distribution of Vacuum Ultraviolet Radiation in an Inductively Coupled Plasma

Author: Babis Jeffery   Pilon Michael J.   Denton M. Bonner  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.44, Iss.8, 1990-09, pp. : 1281-1289

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