Determination of Temperature and Composition of Phosphosilicate Glass Thin Films from Infrared Emission Spectral Data

Author: Wangmaneerat B.   Niemczyk T. M.   Haaland D. M.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.46, Iss.10, 1992-10, pp. : 1447-1453

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