Near-Infrared Spectroscopy for Monitoring Wafer Etchant Solution Using a Teflon Tube

Author： Lee Youngbok Nah Sanghee Namkung Hankyu Chung Hoeil

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.59, Iss.7, 2005-07, pp. : 952-955

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