Characterization of Silicon Dioxide Films on a 4H-SiC Si(0001) Face by Fourier Transform Infrared (FT-IR) Spectroscopy and Cathodoluminescence Spectroscopy

Author: Yoshikawa Masanobu   Seki Hirohumi   Inoue Keiko   Matsuda Keiko   Tanahashi Yusaku   Sako Hideki   Nanen Yuihiro   Kato Muneharu   Kimoto Tsunenobu  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.65, Iss.5, 2011-05, pp. : 543-548

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Abstract