Abnormal Behavior of Longitudinal Optical Phonon in Silicon Dioxide Films on 4H-SiC Bulk Epitaxial Substrate Using Fourier Transform Infrared (FT-IR) Spectroscopy

Author： Yoshikawa Masanobu   Seki Hirohumi   Yamane Tsuneyuki   Nanen Yuichiro   Kato Muneharu   Kimoto Tsunenobu  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.67, Iss.5, 2013-05, pp. : 542-545

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