Quantum Cascade Laser-Based Measurement of Metal Alkylamide Density During Atomic Layer Deposition

Author： Maslar James E   Kimes William A   Sperling Brent A  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.66, Iss.3, 2012-03, pp. : 324-333

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