Measurements of Metal Alkylamide Density During Atomic Layer Deposition Using a Mid-Infrared Light-Emitting Diode (LED) Source

Publisher： Society for Applied Spectroscopy

E-ISSN： 1943-3530|69|3|332-341

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.69, Iss.3, 2015-03, pp. : 332-341

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