Environmental noise control for semiconductor manufacturing facilities

By Gendreau Michael   Wu Mei  

INTER-NOISE and NOISE-CON Congress and Conference Proceedings, Vol. 1999, Iss. 2, 1999-12 ,pp. : 1099-1104

Institute of Noise Control Engineering

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Experiments on adaptive active control of structural vibrations

By Tian J.   To W.M.   Chang C.C.  

INTER-NOISE and NOISE-CON Congress and Conference Proceedings, Vol. 1998, Iss. 6, 1998-10 ,pp. : 212-215

Institute of Noise Control Engineering

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Active vibration control technology for the precision equipment against the seismic excitation

By Choi Hyun   Sim Sang-Duk   Kim Doo-Hoon   Lee Sang-Jo  

INTER-NOISE and NOISE-CON Congress and Conference Proceedings, Vol. 1998, Iss. 5, 1998-10 ,pp. : 613-615

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Active vibration control applied to a vacuum pump for high-precision equipment

By Berkhoff A.P.   Wesselink J.M.   Basten T.G.H.  

INTER-NOISE and NOISE-CON Congress and Conference Proceedings, Vol. 2008, Iss. 5, 2008-10 ,pp. : 4004-4011

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A model based active vibration control for pedestal of semiconductor equipment

By Chung Yu-Liang   Chow Yong-Lo   Lin Jang-Yann  

INTER-NOISE and NOISE-CON Congress and Conference Proceedings, Vol. 1999, Iss. 5, 1999-12 ,pp. : 167-176

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