Microstructure and Orientation of TiSi2Layers on (111) Si

Author: Ievlev V.M.   Kushchev S.B.   Soldatenko S.A.   Isaev A.Y.   Rubtsov V.I.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.37, Iss.12, 2001-12, pp. : 1256-1260

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Abstract