Composition and Structure of Films Deposited from Silyl Derivatives of Asymmetrical Dimethylhydrazine

Author: Smirnova T.P.   Badalyan A.M.   Yakovkina L.V.   Shmakov A.N.   Asanov I.P.   Borisov V.O.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.39, Iss.2, 2003-02, pp. : 117-122

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