Effect of the chemical structure of silyl derivatives of unsymmetrical dimethylhydrazine on the composition and structure of silicon carbonitride films: Theoretical and experimental studies

Author: Smirnova T.   Shainyan B.   Borisov V.   Rakhlin V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.43, Iss.4, 2007-04, pp. : 373-378

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