Doping Effect on the Structure of Polycrystalline Silicon Films Grown via Silane Pyrolysis

Author: Kovalevskii A.   Borisenko V.   Borisevich V.   Dolbik A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.41, Iss.12, 2005-12, pp. : 1260-1265

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content