Plasma Deposition and Properties of Silicon Carbonitride Films

Author: Smirnova T.   Badalyan A.   Borisov V.   Kaichev V.   Bakhturova L.   Kichai V.   Rakhlin V.   Shainyan B.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.41, Iss.7, 2005-07, pp. : 706-712

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