Elemental composition analysis of silicon carbonitride thin films by energy dispersive spectroscopy

Author： Rumyantsev Yu.   Fainer N.   Maximovskii E.   Ayupov B.  

Publisher： Springer Publishing Company

ISSN： 0022-4766

Source： Journal of Structural Chemistry, Vol.51, Iss.1, 2010-12, pp. : 179-185

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