Effect of annealing temperature on microstructure of microwave dielectric ceramic thin films fabricated by RF magnetron sputtering

Author： Shi Feng   Cui Chuanwen  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-1685

Source： Inorganic Materials, Vol.46, Iss.5, 2010-05, pp. : 565-569

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