Effect of VB2RF Magnetron Sputtering Conditions on the Composition and Structure of Deposited Films

Author： Ignatenko P.I. Terpii D.N. Petukhov V.V. Goncharov A.A.

ISSN： 0020-1685

Source： Inorganic Materials, Vol.37, Iss.10, 2001-10, pp. : 1021-1023

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