Fundamental investigation of silicon wafer edge treatment by ultrasonically assisted polishing (UAP)

Author: Wu Yongbo   Yang Weiping  

Publisher: Inderscience Publishers

ISSN: 0268-1900

Source: International Journal of Materials and Product Technology, Vol.40, Iss.3-4, 2011-04, pp. : 264-276

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract