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Publisher: IOP Publishing
Founded in: 1991
Total resources: 42
E-ISSN: 1361-6439
ISSN: 0960-1317
Subject: T Industrial Technology
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Journal of Micromechanics and Microengineering
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Temperature dependence of the scanning performance of an electrostatic microscanner
By Ishikawa Noriaki,Ikeda Kentaro,Sawada Renshi in (2016)
Journal of Micromechanics and Microengineering , Vol. 26, Iss. 3, 2016-03 , pp.![](/images/ico/ico5.png)
Fabrication of circular sawtooth gratings using focused UV lithography
By Mi Wujun,Karlsson Staffan,Holmberg Anders,Danielsson Mats,Nillius Peter in (2016)
Journal of Micromechanics and Microengineering , Vol. 26, Iss. 3, 2016-03 , pp.![](/images/ico/ico5.png)
By Chen Yuan-Liu,Cai Yindi,Shimizu Yuki,Ito So,Gao Wei,Ju Bing-Feng in (2016)
Journal of Micromechanics and Microengineering , Vol. 26, Iss. 2, 2016-02 , pp.![](/images/ico/ico5.png)
By Bagolini Alvise,Picciotto Antonino,Crivellari Michele,Conci Paolo,Bellutti Pierluigi in (2016)
Journal of Micromechanics and Microengineering , Vol. 26, Iss. 2, 2016-02 , pp.![](/images/ico/ico5.png)
By Xiao D B,Li Q S,Hou Z Q,Wang X H,Chen Z H,Xia D W,Wu X Z in (2016)
Journal of Micromechanics and Microengineering , Vol. 26, Iss. 2, 2016-02 , pp.![](/images/ico/ico5.png)
MEMS mass spectrometers: the next wave of miniaturization
By Syms Richard R A,Wright Steven in (2016)
Journal of Micromechanics and Microengineering , Vol. 26, Iss. 2, 2016-02 , pp.![](/images/ico/ico5.png)
By Sung Wei-Lun,Chen Chih-Chung,Huang Kevin,Fang Weileun in (2016)
Journal of Micromechanics and Microengineering , Vol. 26, Iss. 2, 2016-02 , pp.![](/images/ico/ico5.png)
Lipid dip-pen nanolithography on self-assembled monolayers
By Gavutis Martynas,Navikas Vytautas,Rakickas Tomas,Vaitekonis Šarūnas,Valiokas Ramūnas in (2016)
Journal of Micromechanics and Microengineering , Vol. 26, Iss. 2, 2016-02 , pp.![](/images/ico/ico5.png)
By Fu Jianyu,Shang Haiping,Shi Haitao,Li Zhigang,Ou Yi,Chen Dapeng,Zhang Qingchuan in (2016)
Journal of Micromechanics and Microengineering , Vol. 26, Iss. 2, 2016-02 , pp.![](/images/ico/ico5.png)
By Parthiban R,Ramakrishnan N,Parthiban R in (2016)
Journal of Micromechanics and Microengineering , Vol. 26, Iss. 2, 2016-02 , pp.