Interbay Automated Material Handling System stocker design for wafer fabrication facilities

Author： Lin Chiahung J.   Yang Taho   Padillo Jose M.   Beres Debbie  

Publisher： Inderscience Publishers

ISSN： 1368-2148

Source： International Journal of Manufacturing Technology and Management, Vol.1, Iss.2-3, 2003-07, pp. : 147-155

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