Author: Golovashkin A. Karuzskii A. Mishachev V. Orlikovsky A. Privezentsev V. Tshovrebov A.
Publisher: MAIK Nauka/Interperiodica
ISSN: 1063-7397
Source: Russian Microelectronics, Vol.35, Iss.6, 2006-12, pp. : 354-358
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Abstract
A method is proposed for counting small numbers of impurity paramagnetic centers in semiconductor specimens. It involves SQUID measurement of static magnetic susceptibility under resonant microwave saturation of the magnetic sublevels. The ultimate sensitivity of the method is calculated and compared with those of other approaches.
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