Study of the methods of calibration of the process OPC VT-5 models with a variable threshold

Author： Rodionov I.   Amirkhanov A.   Kukina N.   Lokhov A.   Mikhal’tsov E.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.39, Iss.6, 2010-11, pp. : 443-455

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