Atomic layer deposition of the titanium dioxide thin film from tetraethoxytitanium and water

Author: Alekhin A.   Lapushkin G.   Markeev A.   Sigarev A.   Toknova V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1070-3632

Source: Russian Journal of General Chemistry, Vol.80, Iss.6, 2010-06, pp. : 1091-1096

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