The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO₂ Films Deposited by Atomic Layer Deposition

Author： Wilson Rachel L. Simion Cristian Eugen Blackman Christopher S. Carmalt Claire J. Stanoiu Adelina Di Maggio Francesco Covington James A.

Publisher： MDPI

E-ISSN： 1424-8220|18|3|735-735

ISSN： 1424-8220

Source： Sensors, Vol.18, Iss.3, 2018-03, pp. : 735-735

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