Thin Near-Surface Layer in a Resist Film

Author: Trigub V. I.   Plotnov A. V.   Kiselev A. N.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1070-4272

Source: Russian Journal of Applied Chemistry, Vol.76, Iss.8, 2003-08, pp. : 1360-1361

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