Synthesis and Physicochemical Properties of Nanocrystalline Silicon Carbonitride Films Deposited by Microwave Plasma from Organoelement Compounds

Author： Fainer N. Kosinova M. Rumyantsev Yu. Maksimovskii E. Kuznetsov F. Kesler V. Kirienko V. Han Bao-Shan Lu Cheng

Publisher： MAIK Nauka/Interperiodica

ISSN： 1087-6596

Source： Glass Physics and Chemistry, Vol.31, Iss.4, 2005-07, pp. : 427-432

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