Characterization of some trimethyl(organylamino)silanes—precursors for preparation of silicon carbonitride films

Author: Rakhlin V.   Tsirendorzhieva I.   Voronkov M.   Nikulina L.   Sysoev S.   Kosinova M.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1087-6596

Source: Glass Physics and Chemistry, Vol.36, Iss.3, 2010-06, pp. : 376-381

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