Characterisation of nitride thin films by electron backscatter diffraction and electron channelling contrast imaging

Author: Trager-Cowan C.   Sweeney F.   Winkelmann A.   Wilkinson A. J.   Trimby P. W.   Day A. P.   Gholinia A.   Schmidt N. H.   Parbrook P. J.   Watson I. M.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.22, Iss.11, 2006-11, pp. : 1352-1358

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Abstract