Localised strain characterisation in semiconductor structures using electron diffraction contrast imaging

Author: Janssens K. G. F.   Van der Biest O.   Vanheliemont J.   Maes H. E.   Hull R.   Bean J. C.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.11, Iss.1, 1995-01, pp. : 66-71

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