Impact of post-deposition annealing on surface, bulk and interface properties of RF sputtered AlN films

Author： Kar J. P.   Mukherjee S.   Bose G.   Tuli S.   Myoung J. M.  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.25, Iss.8, 2009-08, pp. : 1023-1027

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