Author: Miyazawa K. Yano J. Kaga M. Ito Y. Ito K. Maeda R.
Publisher: Maney Publishing
ISSN: 1743-2944
Source: Surface Engineering, Vol.16, Iss.3, 2000-06, pp. : 239-241
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
SOL-GEL FABRICATION OF PZT THICK FILMS FOR MEMS
By Corkovic S. Whatmore R. W. Zhang Q.
Integrated Ferroelectrics, Vol. 88, Iss. 1, 2007-02 ,pp. :