Sol-Gel PZT for MEMS Applications

By Piekarski Brett   Dubey Madan   Zakar Eugene   Polcawich Ronald   DeVoe Don   Wickenden Dennis  

Integrated Ferroelectrics, Vol. 42, Iss. 1, 2002-01 ,pp. : 25-37

Taylor & Francis Ltd

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Fabrication of Sol-Gel Thin Films of Silicate-Doped PZT

By TAMURA T.   HOKO H.   ARIMOTO Y.   ISHIWARA H.  

Integrated Ferroelectrics, Vol. 62, Iss. 1, 2004-01 ,pp. : 105-107

Taylor & Francis Ltd

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Low Temperature Fabrication of Sol–Gel PZT Thin Films and Structural Characterisation of C₆₀ Precipitates Formed in PZT–C₆₀ Sol

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Surface Engineering, Vol. 17, Iss. 6, 2001-12 ,pp. : 505-511

Maney Publishing

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Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT structure

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Journal of Micromechanics and Microengineering, Vol. 23, Iss. 6, 2013-06 ,pp. : 65014-65024

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