Electrochemical Micromachining on Different Types of GaAs by Confined Etchant Layer Technique

Author: TANG Jing   WANG Wen-Hua   ZHUANG Jin-Liang   CUI Chen  

Publisher: Editorial Office, Spectroscopy and Spectral Analysis

ISSN: 1872-1508

Source: Acta Physico-Chimica Sinica, Vol.25, Iss.8, 2009-08, pp. : 1671-1677

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