Three-dimensional micromachining for microsystems by confined etchant layer technique

Author： Sun J.J.   Huang H.G.   Tian Z.Q.   Xie L.   Luo J.   Ye X.Y.   Zhou Z.Y.   Xia S.H.   Tian Z.W.  

Publisher： Elsevier

ISSN： 0013-4686

Source： Electrochimica Acta, Vol.47, Iss.1, 2001-09, pp. : 95-101

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