Effect of fluorination and hydrogenation by ion implantation on reliability of poly-Si TFTs under gamma irradiation

Author： Jelenković Emil V   Ristić G S   Pejović M M   Jevtić Milan M   Jha Shrawan K   Videnović-Mišić Mirjana   Pejović M   Tong K Y  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.44, Iss.1, 2011-01, pp. : 15101-15107

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