Nanoscale Tapered Pt Bottom Electrode Fabricated by FIB for Low Power and Highly Stable Operations of Phase Change Memory

Author： Shi-Long Lv   Zhi-Tang Song   Yan Liu   Song-Lin Feng  

Publisher： IOP Publishing

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.27, Iss.2, 2010-02, pp. : 28401-28404

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