Dependence of cryogenic strength of hydroxide catalysis bonded silicon on type of surface oxide

Author： Beveridge N L van Veggel A A Cunningham L Hough J Martin I W Nawrodt R Reid S Rowan S

ISSN： 0264-9381

Source： Classical and Quantum Gravity, Vol.30, Iss.2, 2013-01, pp. : 25003-25016

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