The determination of the thickness of the silicon oxide film by synchrotron radiation x-ray photoelectron spectroscopy (SR-XPS) analysis

Author: Imamura M   Matsubayashi N   Fan J   Kojima I   Sasaki M  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.22, Iss.2, 2011-02, pp. : 24007-24011

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