Methods for determining and processing 3D errors and uncertainties for AFM data analysis

Author: Klapetek P   Nečas D   Campbellová A   Yacoot A   Koenders L  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.22, Iss.2, 2011-02, pp. : 25501-25510

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Abstract